The core part of the acceleration sensor

The core part of the acceleration sensor is a micro- mechanical symmetry capacitor , which consists of three mutually separated by a thin glass film composed of silicon wafer , a silicon single crystal coated with a metal film . Intermediate wafer is cantilevered structure more rays , on top of it is a big mass , the mass of the upper and lower surfaces coated with the same metal film , which, on the underlying metal film consists of two silicon capacitor, the capacitance value and the single crystal silicon good elasticity best results can be obtained , which is in the low g-value within the range of measurement results achieved very good reason . Effect of gravity on silicon or silicon electrical accelerated beam power to make the bending oscillations , this bias can be both of the metal film is a capacitor between the electrodes and the measured change in distance . Micromechanical make a relatively large chip capacitor and the capacitance change is easily detected. Two-capacitor structure and its symmetry while improving the stability of the accelerometer zero occurs among them any change in a capacitance across the capacitor will cause similar changes in the compensation. Another symmetry can lead to cross-axis errors. In the assembly of the Engine Water Temperature Sensor VTI symmetry angle accuracy is determined . Different ranges is to adjust the thickness of the sheet string achieved . The humidity sensor element in the cave by the seal pressure determined by the middle of the sealing wafers cave , chord and an outer silicon film composition. The sensor element can be adjusted to meet the needs of different applications , sealing is achieved by bonding the anode and the wafer securely achieved . This also eliminates the need for additional packaging needs , to improve reliability in quality of the accelerometer .